Si · Silicon

Silicon Wafer Finishing

Machine-matched workholding and chemistry-aware contact for controlled single- or double-side wafer finishing.
Application visual: Si · Silicon material blanks
Application material visual

APPLICATION

Silicon Wafer Finishing

  • Thin-wafer support
  • Flatness and thickness control
  • Clean, repeatable contact

PRODUCT AVAILABILITY

Custom products for the application.

  • Multiple product families
  • Custom materials and dimensions
  • Quotation from drawing, sample or requirement

SUPPLY SUPPORT

From samples to repeat orders.

  • Global quotation support
  • Sample and project communication
  • Repeat-order supply

AVAILABLE PRODUCT TYPES

Products that may suit this application.

Final material, dimensions and configuration are confirmed for the order.
NWS-MTC-2101NWS-MTC-2101 Thin Blue-Steel Lapping CarriersThin Blue-Steel Lapping Carriers for thin wafers, quartz and optical glass. Double-sided lapping. Material: Blue steel; Thickness capability: From 0.05 mm; final thickness to drawing. Custom-made for the agreed process.View product →NWS-MTC-2102NWS-MTC-2102 Stainless-Steel Wafer CarriersStainless-Steel Wafer Carriers for wafers, quartz and optical components. Double-sided lapping / polishing. Material: Stainless steel; grade selected for the process; Thickness capability: From 0.05 mm; final thickness to drawing. Custom-made for the agreed process.View product →NWS-CMC-2101NWS-CMC-2101 Metal and Epoxy Composite CarriersMetal and Epoxy Composite Carriers for wafers and precision optical parts. Double-sided lapping / polishing. Construction: Blue-steel or stainless-steel body with epoxy contact inserts; Thickness capability: From 0.25 mm; final thickness to drawing. Custom-made for the agreed process.View product →NWS-LGP-2102NWS-LGP-2102 Grey-Iron Lapping PlatesGrey-Iron Lapping Plates for wafers, glass and precision parts. Lapping. Material grade: HT250 grey iron; Dimensions: Diameter, thickness, mounting and grooves to drawing. Custom-made for the agreed process.View product →NWS-CDT-2101NWS-CDT-2101 Drawing-Controlled Conditioning WheelsDrawing-Controlled Conditioning Wheels for lapping plate surfaces. Plate conditioning. Material options: QT600 ductile iron / HT250 grey iron / 45-grade steel; Geometry: Drawing-controlled contact face, thickness and mounting. Custom-made for the agreed process.View product →NWS-PAD-2302NWS-PAD-2302 Nonwoven Wafer Pre-Polishing PadsNonwoven Wafer Pre-Polishing Pads for sic, gaas, silicon, sapphire and metal. Initial polishing. Thickness: 0.8–4.0 mm; Hardness: Shore A 35–92. Custom-made for the agreed process.View product →NWS-PAD-2303NWS-PAD-2303 Compliant Final-Polishing ClothCompliant Final-Polishing Cloth for sic, gaas, silicon, sapphire and glass. Final polishing. Thickness: 0.5–2.0 mm; Hardness: Shore A 32–65. Custom-made for the agreed process.View product →NWS-PAD-2501NWS-PAD-2501 Synthetic-Fibre Pads for Wafer LappingSynthetic-Fibre Pads for Wafer Lapping for sic, gan, gaas, inp, silicon and optical glass. Lapping / polishing. Typical thickness: 1.30 mm; Typical density: 0.43 g/cm³. Custom-made for the agreed process.View product →NWS-HLD-2101NWS-HLD-2101 Waxless Wafer Support PadsWaxless Wafer Support Pads for silicon, sapphire and compound-semiconductor wafers. Wafer holding. Typical thickness: 0.58 mm; Typical density: 0.57 g/cm³. Custom-made for the agreed process.View product →NWS-POL-3403NWS-POL-3403 Colloidal Silica Wafer-Polishing GradesColloidal Silica Wafer-Polishing Grades for semiconductor wafers and compatible precision surfaces. Fine polishing. Abrasive: Colloidal silica; Particle-size options: 80 / 100 / 120 nm. Custom-made for the agreed process.View product →NWS-POL-3501NWS-POL-3501 Silica Slurry for Intermediate Silicon PolishingSilica Slurry for Intermediate Silicon Polishing for silicon wafers. Intermediate polishing. Abrasive: Colloidal silica; Particle-size reference: 76.42 nm. Custom-made for the agreed process.View product →NWS-POL-3502NWS-POL-3502 Silica Slurry for Final Silicon PolishingSilica Slurry for Final Silicon Polishing for silicon wafers. Fine polishing. Abrasive: Colloidal silica; Particle-size reference: 66.72 nm. Custom-made for the agreed process.View product →NWS-POL-3701NWS-POL-3701 Silica Grades for POLY CMPSilica Grades for POLY CMP for polysilicon films. CMP. Abrasive: Colloidal silica; Typical D50: Approximately 50 nm. Custom-made for the agreed process.View product →NWS-POL-3702NWS-POL-3702 Ceria Grades for STI CMPCeria Grades for STI CMP for oxide / nitride isolation structures. CMP. Abrasive: Cerium oxide; Typical D50: 85 nm. Custom-made for the agreed process.View product →Blue steelBlue-Steel Thin Workpiece CarriersThin single-sheet carriers for applications that need a stiff machine interface and drawing-controlled pockets.View product →Stainless / PHStainless & Precipitation-Hardening CarriersCorrosion-aware metal carrier directions for wet lapping and polishing environments.View product →Machine family7DP–16B Lapping Carrier ReferencesA medium-machine review route covering common 7DP, 9B/DP/S, 10.5B, 11DP, 12B/DP/S, 13-series, 14DP, 15-series and 16B references.View product →Machine family16DP–32B Large-Machine Carrier ReferencesA large-format review route covering 16DP/S, 17B, 18B/S, 20B, 22B, 24B, 30B and 32B references.View product →

APPLICATION QUOTATION

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WORKPIECE & PROCESS FIT

Silicon wafer lapping and substrate polishing

Bare silicon substrates, thin wafers and silicon precision parts.
What to specify
Diameter, thickness, edge profile, orientation, TTV and starting surface; distinguish substrate preparation from patterned-device CMP.
Made-to-order consumables
Carrier geometry and material, plate grooves, pad contact properties, conditioning, cleaning and polishing media are reviewed for the actual process. Drawing review and first-article support establish the repeat-order specification.